CAVITY EQUIPMENT FOR SUPERCONDUCTIVE ACCELERATION AND ITS CLEANING METHOD,申请号JP19970301205-传众专利搜索

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发明名称	CAVITY EQUIPMENT FOR SUPERCONDUCTIVE ACCELERATION AND ITS CLEANING METHOD
摘要
申请公布号	JPH11135298(A)	申请公布日期	1999.05.21
申请号	JP19970301205	申请日期	1997.10.31
申请人	TOSHIBA CORP	发明人	TAKEDA OSAMU;ITO KOJI
分类号	H05H7/20;H01L39/04;(IPC1-7):H05H7/20	主分类号	H05H7/20
代理机构		代理人
主权项
地址

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