Sputtering cathode

摘要

The sputtering cathode includes: a) single plate elements (9, 10, 11, 12) between the target (8) and the face plane (14) of the yoke (3); b) frame shaped plate elements (9, 10, 11) and the strip shaped plate element (12) form ring shaped gaps (a, b, c) which are roughly parallel to the face plane (14); c) magnets (7, ...) are incorporated into the yoke bottom (22) so that their face planes are flush with the yoke bottom.