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发明名称
Gasversorgungseinheit für Bearbeitungskammer
摘要
申请公布号
DE69506831(T2)
申请公布日期
1999.05.20
申请号
DE19956006831T
申请日期
1995.10.13
申请人
APPLIED MATERIALS, INC., SANTA CLARA, CALIF., US
发明人
SALZMAN, PHILIP M., SAN JOSE, CALIFORNIA 95125, US
分类号
H05H1/46;C23C16/44;C23C16/455;C23F4/00;H01J37/32;H01L21/02;H01L21/302;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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