| 发明名称 |
Laser ablation improvement for energy coupling to a film stack |
| 摘要 |
<p>The amount of laser energy absorbed by a dielectric material during laser fuse blow is increased by changing the angle at which the laser is transmitted. An increased angle of incidence will result in increased energy absorption at the top and edge of the device. This technique may eliminate the need for second pass fuse blow. <IMAGE></p> |
| 申请公布号 |
EP0827196(A3) |
申请公布日期 |
1999.05.19 |
| 申请号 |
EP19970306584 |
申请日期 |
1997.08.28 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GALLO, ANTONIO R.;LEE, P., PEI-ING. |
| 分类号 |
B23K26/00;B23K26/06;H01L21/3205;H01L21/768;H01L21/82;H01L23/52;H01L27/10;(IPC1-7):H01L21/768 |
主分类号 |
B23K26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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