| 摘要 |
<p>An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer (12) is placed over the main surface of a silicon chip (10), the sacrificial layer (12) being patterned in the form of the void formed by the desired ink channels. A permanent layer (14), comprising a polybenzoxazole, is applied over the sacrificial layer. After polishing the two layers (12,14) to form a uniform surface, the sacrificial layer is removed. <IMAGE></p> |
