| 发明名称 |
Loadlock cassette with wafer support rails |
| 摘要 |
The present invention provides a wafer cassette generally comprising one or more wafer support plates defining two or more coplanar wafer seats, a movable stem supporting the wafer support plates, and an actuating member connected to the stem to move the wafer support plates.
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| 申请公布号 |
US5905302(A) |
申请公布日期 |
1999.05.18 |
| 申请号 |
US19960752462 |
申请日期 |
1996.11.18 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LANE, CHRISTOPHER;SUNDAR, SATISH |
| 分类号 |
H01L21/673;(IPC1-7):H01L23/02 |
主分类号 |
H01L21/673 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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