| 摘要 |
PROBLEM TO BE SOLVED: To restrain vibration by precisely detecting the magnitudes and the directions of vibration between a moving body and a body to be moved, in a conveying device making use of a magnetic coupling. SOLUTION: In a magnetic coupling for transmitting power by magnetic connecting force of two moving bodies, a vibration sensor 17 is constituted by installing an optical displacement gauge 21 on an inner ring 9 in the moving body and installing a reflecting plate 19 on an outer ring 19 of a body to be moved. The vibration sensor 17 may be installed in the position in which a pair of an inner ring magnet 11 and an outer ring magnet 15 are removed. The reflecting plate 19 is so installed as to be inclined in relation to the projecting direction of light from the optical displacement gauge 21. Reflected light from the reflecting plate 19 is received by the optical displacement gauge 21. When relative displacement is generated between two moving bodies, the light transmitting distance of reflected light from the reflecting plate 19 to the optical displacement gauge 21 is changed, and the light receiving position of a light position detecting element of the optical displacement gauge 21 is displaced. The light position detecting element detects this displacement and outputs an electric signal corresponding to the displacement. Vibration of the moving body is restrained by controlling the relative displacement between two moving bodies on the basis of the electric signal. |
