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发明名称
DEVICE AND METHOD FOR FORMING DIELECTRIC THIN FILM
摘要
申请公布号
JPH11131238(A)
申请公布日期
1999.05.18
申请号
JP19970293048
申请日期
1997.10.24
申请人
MATSUSHITA ELECTRON CORP
发明人
MIKAWA TAKUMI
分类号
C23C16/44;B05C11/08;C23C16/455;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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