| 摘要 |
PROBLEM TO BE SOLVED: To provide a component mounting device, wherein the entire device configuration is simpler and kinetic load that is generated is reduced or distributed. SOLUTION: A substrate stage 10 which, is movable in a Y-direction with a substrate 20 mounted, and first second attaching heads 30 and 60 which mounted with attaching nozzles 31a-31d, and 61a-61d, are movable in an X- direction, independently of the movement of the substrate stage to and from component supply devices 71-74 with the substrate in between, is provided. The first and second attaching heads are moved alternately in substrate direction, and the component which is vacuum-clamped with each vacuum-clamping nozzle is mounted on the substrate. Here, acceleration/deceleration of the second attaching head 60 is controlled so as to cancel a force generated by the acceleration/deceleration of the first attaching head 30. The generated kinetic load that follows the movement of the attaching head is reduced or distributed. |
