发明名称 DRESSER AND DRESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dresser and a dressing device which can obtain a sufficient dressing effect as well as realizes a labor saving of the dressing work. SOLUTION: This dressing device 1 has a dresser 2 and a dresser driving device 3. The dresser 2 has brushes 11a and 11b planted on the upper and the lower surfaces of a dresser main body 10, and scrapers 12a and 12b projected in the longitudinal direction of the dresser main body 10, while the dresser driving device 3 has an oscillating mechanism to oscillate the dresser 2 in the radial direction of a surface plate, Favorably, a spring to energize the scrapers 12a and 12b in the projecting direction is provided in the main body 10.
申请公布号 JPH11123658(A) 申请公布日期 1999.05.11
申请号 JP19970306621 申请日期 1997.10.21
申请人 SPEEDFAM CO LTD 发明人 SUZUKI TOSHINARI
分类号 B24B53/12;B24B53/007 主分类号 B24B53/12
代理机构 代理人
主权项
地址
您可能感兴趣的专利