Scanning wheel for ion implantation process chamber,申请号GB19990005620-传众专利搜索

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发明名称	Scanning wheel for ion implantation process chamber
摘要
申请公布号	GB9905620(D0)	申请公布日期	1999.05.05
申请号	GB19990005620	申请日期	1999.03.11
申请人	APPLIED MATERIALS INC	发明人
分类号	C23C14/48;H01J37/317;H01L21/00;H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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