发明名称 Method for optical inspection and lithography
摘要 A process for illuminating a structured surface initially introduces a fluid into a volume, the fluid nearly completely chemically inactive with respect to the structured surface. Next, pressure and temperature are established within the volume which maintains the fluid in a supercritical state. The structured surface is then immersed in the supercritical fluid, and optical energy is directed through the supercritical fluid and onto the structured surface.
申请公布号 US5900354(A) 申请公布日期 1999.05.04
申请号 US19970887698 申请日期 1997.07.03
申请人 BATCHELDER, JOHN SAMUEL 发明人 BATCHELDER, JOHN SAMUEL
分类号 G03F7/20;(IPC1-7):G03F7/20 主分类号 G03F7/20
代理机构 代理人
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