发明名称 Method for forming field effect transistor having multiple gate electrodes surrounding the channel region
摘要 A field effect transistor comprising source and drain regions, a channel region composed of a semiconductor layer formed between the source and drain regions and gate electrodes disposed to at least three surfaces surrounding the channel region. The structure can increase the number of carriers induced in the channel region and enhance the current driving performance and mutual conductance as compared with the single gate structure or double gate structure.
申请公布号 US5899710(A) 申请公布日期 1999.05.04
申请号 US19980030390 申请日期 1998.02.25
申请人 SONY CORPORATION 发明人 MUKAI, MIKIO
分类号 H01L29/78;H01L21/336;H01L29/786;(IPC1-7):H01L21/00 主分类号 H01L29/78
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