发明名称 |
Semiconductor structure design and process visualization through the use of simple process models and intuitive interfaces |
摘要 |
A semiconductor structure design and process visualization tool (10). A main menu (30) allows a user to add, edit or delete process steps (16a-f) to create a process flow in process flow window (12). Main menu (30) provides a set of process models to be selected from. The set of process models are simple first-order geometric models that require only physical parameters of a resulting device layer. Specific process conditions are not required. Semiconductor process and wafer representation tool applies the physical parameters to the corresponding process model to quickly create a cross-section (20) in cross-section window (22) corresponding to a selected process step (16d) in process flow window (12).
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申请公布号 |
US5901062(A) |
申请公布日期 |
1999.05.04 |
申请号 |
US19960719056 |
申请日期 |
1996.09.24 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BURCH, RICHARD GENE;MOZUMDER, PURNENDU KANTI |
分类号 |
G06F17/50;(IPC1-7):G06F17/50;G06F19/00 |
主分类号 |
G06F17/50 |
代理机构 |
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