| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor which can measure the flow rate of fluid flowing through piping accurately over a wide environmental temperature conditions even if the fluid has a relatively low viscosity or the flow rate thereof is relatively low. SOLUTION: A duct 4 for fluid to be detected is formed such that heat is transmitted from a flow rate detecting part 12, formed by laminating a thin film heating element and a thin film heat-sensitive body on the first plane of a substrate through an insulation layer, to a fluid to be inspected and absorbed thereby. At the flow rate detecting part 12, temperature is sensed by the thin film heat-sensitive body subjected to heat absorption by the fluid to be inspected based on heating of the thin film heating element and flow rate of the fluid to be inspected in the duct 4 is detected based on the results of temperature sensing. A fin plate 14 extending into the duct 4 is jointed, through a jointing material 16, to the second plane of the substrate at the flow rate detecting part 12. The fin plate 14 extends through the central part of the circular cross- section of the duct 4 and the dimension thereof in the direction of the duct 4 is larger than the thickness L2 thereof.</p> |
