| 摘要 |
PROBLEM TO BE SOLVED: To realize a cassette rotating mechanism which is capable of stably rotating a wafer cassette at high speed and lower the manufacturing cost by a method, wherein the free end of a cassette mounting pad is pushed up or pulled down, the cassette mounting pad is rotated with moving pieces serve as supporting points, and the moving pieces are made to slide in a horizontal direction. SOLUTION: Through the actuation of an air cylinder 31, the upper end of a cylinder rod 32 pushes up the free end of a rotating substrate 39. A cassette mounting pad 36 is rotated rearward by an angle of 90 deg., a corner 46 is made to advance towards the air cylinder 31 along linear guides 34 through the intermediary of moving pieces 35. A wafer cassette has rotated by an angle of 90 deg., and wafers inside a wafer cassette assumes a horizontal attitude. The wafers are subjected to a prescribed treatment in a semiconductor manufacturing equipment, and a wafer cassette where the treated wafers are housed kept in horizontal position is transferred to an inner loading/unloading stage 38 which is kept horizontal in position. |
