发明名称 |
ALUMINUM NITRIDE HEATER |
摘要 |
A ceramic heater according to the present invention includes a substrate (1) consisting of an aluminum nitride sintered body, and a heating element (2) and a feed electrode (3), mainly composed of silver or a silver alloy, formed on a surface of the substrate (1). The aluminum nitride sintered body contains a group 2A or 3A element in the periodic table or a compound thereof and silicon or a silicon compound of 0.01 to 0.5 percent by weight in terms of the silicon element, and preferably further contains a group 8 transition element or a compound thereof by 0.01 to 1 percent by weight in terms of the element.
|
申请公布号 |
CA2251875(A1) |
申请公布日期 |
1999.04.30 |
申请号 |
CA19982251875 |
申请日期 |
1998.10.27 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
YUSHIO, YASUHISA;NAKATA, HIROHIKO;NATSUHARA, MASUHIRO |
分类号 |
H05B3/20;H05B3/12;H05B3/14;H05B3/16;H05B3/26;(IPC1-7):H05B3/12 |
主分类号 |
H05B3/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|