| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten a waiting time so as to improve a semiconductor wafer manufacturing equipment in operating efficiency by a method, wherein a semiconductor wafer is selectively supplied based on a processing residual time, a processing means or a housing means where the semiconductor wafer is transferred is selected to read out a transfer control switching code, and the semiconductor wafer is transferred by a transferring processing means. SOLUTION: Transfer control switching codes, each allotted to processing equipments 3, 4, and 5 or processing equipment groups are read out in accordance with a program, and it is determined that cassette 2 or cassettes 2 which are transferred to stockers 8 and 10 and processed in accordance with the indications shown by the above codes through processing equipments 3, 4, and 5 which transfer the cassettes 2 can be processed by processing equipment 3, 4, and 5 to which the cassettes 2 are transferred. If the cassettes 2 can be processed, the cassettes 2 are immediately transferred to the processing equipments 3, 4 and 5 on a direct transfer mode, or the cassettes 2 are transferred to a transferring stocker 8 based on a takeover mode which discriminates whether the cassettes 2 are transferred to the stocker 8, in accordance with the indications shown by the codes.</p> |
