Local intercalation zone is produced by cathodic sputtering or field evaporation

摘要

An intercalate is produced by employing cathodic sputtering or field evaporation for high kinetic energy bombardment of a host substance with atoms, molecules or ions of a guest substance. An Independent claim is also included for a host substance with one or more intercalation zones of sub-micron size, preferably with lateral dimensions of less than 250 nm. Preferred Features: A mask is initially applied to the host substance so that a locally confined intercalate is created. An electrode, used for field evaporation, is moved over the host substance parallel to its surface.