| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent reduction in positioning accuracy due to thermal deformation and any burning loss in a stator coil from occurring by cooling this conveyor system operating in a vacuum chamber. SOLUTION: In this conveyor system equipped with an X-axis linear motor 5 made up by a stator 6 installed in space between an X-axis table 4, installed on a base 2 in a vacuum chamber 1 via an X-axis guide rail 3, and a Y-axis guide rail 3 and a needle 7 installed on an underside of the X-axis table 4, and a Y-axis linear motor 10 made up by a stator 11 installed in space between a Y-axis table 9, being installed via a Y-axis guide rail 8 installed on the X-axis table 4, and this Y-axis guide rail 8 and a needle 12 installed on an underside of the Y-axis table 9, it is also equipped with a circulating path 13 embedded with a part paralleled with the X-axis guide rail 3 in the base 2, a heat receiving surface 2a installed on top of the base 2 in and around this circulating path 13, and a radiating surface 4b installed on the underside of the X-axis table 4 to be opposed to this heat receiving surface 2a, respectively. In this constitution, the conveyor system in the vacuum chamber 1 is cooled and thereby any burning loss in a stator coil is preventable in this way.</p> |
