发明名称 Electron microscope
摘要 A method of operating an electron microscope under a high temperature and the electron microscope are provided. The electron microscope can stably set and efficiently heat a sample to observe and measure high temperature physical properties such as phase transformation, phase transition and the like required for development of a heat resistant material. In the method of operating the electron microscope and the electron microscope, a sample to be observed is set so as to position at a central hole of a double spiral flat filament, the detachable heating stage is fixed to the heating holder using screws of a pivot, and the heating stage is tilted by vertical movement of a crank-shaped arm. The heating stage and the arm are insulated from each other by an insulating body, and current from a power source is conducted by a conductor wire to heat the filament.
申请公布号 US5898177(A) 申请公布日期 1999.04.27
申请号 US19970900001 申请日期 1997.07.24
申请人 HITACHI, LTD.;HITACHI INSTRUMENTS ENGINEERING CO. LTD. 发明人 HIDAKA, KISHIO;KAMINO, TAKEO;YAGUCHI, TOSHIE;USAMI, KATSUHISA;AOYAMA, TAKASHI;NAKAMURA, SHIGEYOSHI;HIRAGA, RYO;TOMITA, MASAHIRO
分类号 H01J37/20;(IPC1-7):H01J37/20 主分类号 H01J37/20
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