发明名称
摘要 PURPOSE:To effectively cool a body to be heated after heating by a simple constitution, by equipping the side wall of a heating vessel with an aperture for making cooling gas flow, equipping the lower side of the periphery of heating plate of the heating vessel with an exhaust vent, and fixing an exhaust guide to a part of the aperture. CONSTITUTION:Rectanglur apertures 34, 35 for taking in clean air at the time of cooling are bored in a side wall 20A facing a track 111 of a heating vessel 20 and in a side wall 20B opposing the side wall 20A, respectively. The side wall 20B distant from the track 111 side is equipped with an exhaust vent 36 and an exhaust duct 37 linking with the exhaust vent 36. The exhaust vent 36 penetrates the inside of the side wall toward the left side. At the aperture 35, an exhaust guide 40 is fixed to the side wall 20B by screwing and the like. This guide 40 is equipped with an inclined plate 41 in the middle part of the longitudinal direction, in the manner in which clean air from the outside of the heating vessel 20 is made to flow toward the ceiling direction inside the heating vessel by the effect of the inclined plate 41.
申请公布号 JP2887692(B2) 申请公布日期 1999.04.26
申请号 JP19900183829 申请日期 1990.07.11
申请人 TOKYO EREKUTORON KK 发明人 HIRAKAWA OSAMU;KURODA YUKITERU
分类号 G03F7/26;H01L21/027;H01L21/30;(IPC1-7):H01L21/027 主分类号 G03F7/26
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