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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11111710(A)
申请公布日期
1999.04.23
申请号
JP19970268713
申请日期
1997.10.01
申请人
NEC CORP
发明人
TOGO MITSUHIRO
分类号
H01L21/316;H01L21/265;H01L21/76;H01L21/762;H01L21/763;(IPC1-7):H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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