ANGULAR VELOCITY SENSOR

摘要

An angular velocity sensor which ensures a stable detection sensitivity irrespective of a change in the environment in which it is used and eliminates the effect caused by the air viscosity, comprising an exciting unit (10) supported by elastic beam portions (11, 12, 13, 14) so as to oscillate in the longitudinal direction and an oscillator (20) constituted of a mass unit (21) and an elastic beam portion (22), wherein the mass unit (21) is coupled by an elastic beam portion (22) to the exciting unit (10) so as to oscillate in the transverse and longitudinal directions. The exciting unit (10) is oscillated by an actuator (15) in the longitudinal direction at a drive oscillation frequency omega d which is set to a value far away from a resonance oscillation frequency omega a of the exciting unit (10) in the longitudinal direction and a resonance oscillation frequency omega b of the oscillator (20) in the longitudinal direction, but close to a resonance oscillation frequency omega s of the oscillator (20) in the transverse direction. When an angular velocity is applied, the oscillator (20) oscillates in the transverse direction and this oscillation is detected by an oscillation sensor (23). The elastic beam portion (22) of the oscillator (20) has a thickness (height) larger than its width.