Superhard material film structure, process of making and use of same

摘要

A multi-layer diamond film (14) is grown by d.c. arc assisted plasma deposition. A series of layers (18) are deposited on each other by renucleation during deposition. Renucleation is controlled by varying the proportion of methane to hydrogen in the fee gases, by temperature cycling of the substrate, or by including modal changes in the arc.