发明名称 Semiconductor device having opening portion for fuse breakage
摘要 A semiconductor device according to the present invention comprises a fuse provided on a substrate, a first insulating layer formed on the substrate and the first insulating layer, a first wiring formed on the first insulating layer, a second insulating layer formed on the first wiring, the second insulating layer including a plurality of insulating films including a water absorptive overcoat, a second wiring formed on the second insulating layer, an opening portion formed in a portion of the second insulating layer corresponding to the fuse by selectively removing the portion and having a side face formed by an exposed portion of the second insulating layer and a bottom face formed by the exposed first insulating layer, a side wall film formed of the same material as that of the second wiring and covering the exposed side face of the opening portion and a passivation film formed on the second insulating layer, the second insulating layer and the side wall film.
申请公布号 US5895963(A) 申请公布日期 1999.04.20
申请号 US19980019737 申请日期 1998.02.06
申请人 NEC CORPORATION 发明人 YAMAZAKI, YASUSHI
分类号 H01L21/3205;H01H85/046;H01L21/82;H01L23/52;H01L23/525;(IPC1-7):H01H85/046 主分类号 H01L21/3205
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