SUBSTRATE HOLDER AND SPUTTERING DEVICE HAVING THE SUBSTRATE HOLDER,申请号JP19970274555-传众专利搜索

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发明名称	SUBSTRATE HOLDER AND SPUTTERING DEVICE HAVING THE SUBSTRATE HOLDER
摘要
申请公布号	JPH11106917(A)	申请公布日期	1999.04.20
申请号	JP19970274555	申请日期	1997.10.07
申请人	SONY CORP	发明人	OLIVER C
分类号	C23C14/34;C23C14/50;(IPC1-7):C23C14/50	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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