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发明名称
PLASMA TREATMENT SYSTEM
摘要
申请公布号
JPH11106929(A)
申请公布日期
1999.04.20
申请号
JP19970266829
申请日期
1997.09.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
TOMOHISA SHINGO;TAKI MASAKAZU;SHINTANI KENJI;NISHIKAWA KAZUYASU;ODERA HIROKI;OMORI TATSUO
分类号
C23C16/44;C23C16/50;C23C16/515;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C16/50;H01L21/306
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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