| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP;NIPPON TELEGRAPH AND TELEPHONE CORP., TOKIO/TOKYO, JP |
发明人 |
YAMADA, MOTOYUKI, OHMIYA-SHI, SAITAMA-KEN, JP;WATANABE, OSAMU, JHOUETSU-SHI, NIIGATA-KEN, JP;TANAKA, AKINOBU, ATSUGI-SHI, KANAGAWA-KEN, JP;BAN, HIROSHI, ATSUGI-SHI, KANAGAWA-KEN, JP;KAWAI, YOSHIO, ISEHARA-SHI, KANAGAWA-KEN, JP |
