发明名称 METHOD AND DEVICE FOR SURFACE-TREATING SUBSTRATES
摘要 The invention relates to a method for surface treatment of at least one substrate (1), which is electrically conductive or coated so as to be conductive, by means of a gas situated in the area of an electric discharge (2). The discharge area is delimited on at least two substantially opposite sides by the substrate surfaces (7) that are to be treated. This method is particularly suited for treating band-shaped, continuously conveyed substrates.
申请公布号 WO9918593(A1) 申请公布日期 1999.04.15
申请号 WO1998EP05982 申请日期 1998.09.18
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;JUNG, THOMAS;KLAGES, CLAUS-PETER 发明人 JUNG, THOMAS;KLAGES, CLAUS-PETER
分类号 C23C16/50;C23C16/54;H01J37/32;H05H1/24 主分类号 C23C16/50
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