WAFER HOLDER OF ETCHING APPARATUS,申请号KR19950052737-传众专利搜索

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发明名称	WAFER HOLDER OF ETCHING APPARATUS
摘要
申请公布号	KR0181206(B1)	申请公布日期	1999.04.15
申请号	KR19950052737	申请日期	1995.12.20
申请人	OPTEL SEMICONDUCTOR CORP.	发明人	JO, JANG-YEON;LEE, CHEOL-SOO
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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