发明名称 PROCESS AND DEVICE FOR THOROUGHLY CLEANING SURFACES
摘要 <p>PCT No. PCT/EP95/03838 Sec. 371 Date Jun. 9, 1997 Sec. 102(e) Date Jun. 9, 1997 PCT Filed Sep. 28, 1995 PCT Pub. No. WO96/10463 PCT Pub. Date Apr. 11, 1996A method and device for cleaning contaminated surfaces with both water and steam. A water film is applied to the contaminated surface and steam sprayed into the water film while water is continued to be applied to the water film. In this way the steam is directed into the water film and through the water film onto the contaminated surface, whereby contaminates in the contaminated surface are removed.</p>
申请公布号 EP0784517(B1) 申请公布日期 1999.04.14
申请号 EP19950934649 申请日期 1995.09.28
申请人 KUNZE-CONCEWITZ, HORST 发明人 KUNZE-CONCEWITZ, HORST
分类号 B08B3/00;B08B3/02;B08B11/02;B24B37/04;H01L21/00;H01L21/304;H01L21/306;(IPC1-7):B08B3/00 主分类号 B08B3/00
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