| 发明名称 |
Semiconductor wafer transfer apparatus |
| 摘要 |
<p>A holding device (3) has two rollers (1,2) arranged horizontally and in parallel having ring grooves (10) for holding wafers. A sunken groove at each third ring groove transports wafers (4) up or down between the rollers. Two moving lifting devices (5,6) with holding combs (7,8) for the wafers allow vertical movement.</p> |
| 申请公布号 |
EP0908927(A2) |
申请公布日期 |
1999.04.14 |
| 申请号 |
EP19970115686 |
申请日期 |
1997.09.10 |
| 申请人 |
TEC-SEM AG |
发明人 |
BLATTNER, JAKOB;BACHMANN, ROLF;RUEEGG, HANNO |
| 分类号 |
B65G49/07;H01L21/677;H01L21/673;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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