发明名称 METAL STAPLES TO PREVENT INTERLAYER DELAMINATION
摘要 The present invention provides in one embodiment thereof an integrated circuit (IC) that includes silicon substrate. The integrated circuit includes a plurality of dielectric and metal layers formed upon the silicon substrate. The plurality of dielectric and metal layers form a die active area (501). The metal have formed therein a first guard wall (508) surrounding the die active area. The metal layers further have formed therein a second segmented guard wall. The segments guard wall surrounds and staples the plurality of metal layers (M1, M2, M3, M4, M5). The IC also includes a passivation layer adhering to the first and the segmented guard walls.
申请公布号 WO9917348(A1) 申请公布日期 1999.04.08
申请号 WO1998US14023 申请日期 1998.07.06
申请人 INTEL CORPORATION;SESHAN, KRISHNA;MIELKE, NEAL, R. 发明人 SESHAN, KRISHNA;MIELKE, NEAL, R.
分类号 H01L23/31;H01L23/58;(IPC1-7):H01L21/283;H01L23/48;H01L29/41 主分类号 H01L23/31
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