Method and apparatus for microfinishing

摘要

A method of microfinishing a surface of a workpiece in which a shoe is pressed against the surface of the workpiece while the workpiece is rotating. The shoe is vibrated at a high frequency and is made of diamond or similar very hard material. Apparatus for carrying out the method includes a drive for rotating the workpiece, a linear actuator for pressing the shoe against the rotating workpiece, and a vibrator for vibrating the shoe.