发明名称 Process for converting a wire bond pad to a flip chip solder bump pad and pad formed thereby
摘要 A method for forming a solder bump pad (22), and more particularly converting a wire bond pad (12) of a surface-mount IC device (10) to a flip chip solder bump pad (22), such that the IC device (10) can be flip-chip mounted to a substrate. The process generally entails an aluminum wire bond pad (12) on a substrate, with at least a portion of the wire bond pad (12) being exposed through a dielectric layer (16) on the substrate. A nickel layer (24) is then deposited on the portion of the wire bond pad (12) exposed through the dielectric layer (16). The nickel layer (24) is selectively deposited on the exposed portion of the wire bond pad (12) without use of a masking operation, such as by an electroless deposition technique. The nickel layer (24) completely overlies the aluminum wire bond pad (12), and therefore protects the bond pad (12) from oxidation due to exposure. Thereafter, the solder bump pad (22) is formed by depositing a solderable material on the nickel layer (24). The solder bump pad (22) is formed to cover only a limited portion of the nickel layer (24), and its shape is tailored to achieve the required geometric characteristics for a solder bump (26) subsequently formed on the solder bump pad (22).
申请公布号 US5891756(A) 申请公布日期 1999.04.06
申请号 US19970883694 申请日期 1997.06.27
申请人 DELCO ELECTRONICS CORPORATION 发明人 ERICKSON, CURT A
分类号 H01L21/60;H01L23/485;(IPC1-7):H01L21/44;H01L21/48;H01L21/50 主分类号 H01L21/60
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