| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a stored substrate from protruding from a substrate storage device by providing a pair of inlet supports and a pair of deep supports wherein the inlet supports and the deep supports hold the substrate while it is inclined downward toward a deeper direction of the storage device. SOLUTION: A substrate 3 stored in the substrate storage device is held by a pair of inlet substrate supports 1 provided oppositely at equal distances from a lowermost face 4 of the device and a pair of deep substrate supports 2 provided oppositely at equal distances from a lowermost face 4 of the storage device. In this case the inlet substrate supports 1 and the deep substrate supports 2 holding a single substrate 3 are placed so that the substrate 3 is received while being inclined downward toward a deeper direction of the storage device. Difference in height of the inlet substrate supports 1 from the lowermost face 4 of the deep substrate supports 2 is approximately 0.5 to several mm.</p> |
