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发明名称
APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0175025(B1)
申请公布日期
1999.04.01
申请号
KR19950041257
申请日期
1995.11.14
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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