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发明名称
EXPOSURE DEVICE FOR FORMING PATTERN
摘要
申请公布号
KR0179937(B1)
申请公布日期
1999.04.01
申请号
KR19960077491
申请日期
1996.12.30
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, KWANG-CHOL
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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