ORDERED MESOPOROUS THIN FILMS

摘要

This invention comprises a method to form a family of supported films with pore size in the approximate range 0.8 - 20 nm exh ibiting highly ordered microstructures and porosity derived from an ordered micellar or liquid-crystalline organic-inorganic precursor structure that forms during film deposition. Optically transparent, 100 - 500 nm thick films exhibiting a unique range of microstructures and uni-modal pore sizes are formed in seconds in a continuous coating operation. Applications of these films include sensors, membranes, low dielectric constant interlayers, anti-reflective coatings, and optical hosts.