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发明名称
摘要
申请公布号
JP2877800(B2)
申请公布日期
1999.03.31
申请号
JP19980077347
申请日期
1998.03.25
申请人
KYANON KK
发明人
OMI KAZUAKI;SAKAGUCHI KYOBUMI;YANAGIDA KAZUTAKA;YONEHARA TAKAO
分类号
H01L27/12;H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L27/12
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代理人
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