发明名称 |
Method for making a sculptured diaphragm |
摘要 |
A sculptured diaphragm of a sensor is fabricated by providing a semiconductor material, forming at least one cavity on the front side of the semiconductor material, forming a diaphragm layer over the semiconductor material, and the etching a cavity on the back side of the semiconductor material. If a sensor having a diaphragm with a central boss is desired, then the diaphragm layer is planarized to form a thick and a thin portion in the diaphragm layer.
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申请公布号 |
US5888412(A) |
申请公布日期 |
1999.03.30 |
申请号 |
US19960610033 |
申请日期 |
1996.03.04 |
申请人 |
MOTOROLA, INC. |
发明人 |
SOORIAKUMAR, KATHIRGAMASUNDARAM;MCNEIL, ANDREW C.;GOLDMAN, KENNETH G.;SHAH, MAHESH K. |
分类号 |
G01L9/00;(IPC1-7):B44C1/22 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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