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发明名称
DEVCIE FOR VIBRATING WAFERS IN WET STATION
摘要
申请公布号
KR0136123(Y1)
申请公布日期
1999.03.30
申请号
KR19950053512U
申请日期
1995.12.29
申请人
DAEWOO ELECTRONIC COMPONENTS CO.,LTD
发明人
JUNG, SUNG-WOO
分类号
(IPC1-7):H01L21/341
主分类号
(IPC1-7):H01L21/341
代理机构
代理人
主权项
地址
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