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发明名称
ALIGN KEY FORMING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0170734(B1)
申请公布日期
1999.03.30
申请号
KR19960001398
申请日期
1996.01.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
BOO, JAE-PIL;KIM, JUNG-YEUP;KIM, MIN-JUNG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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