发明名称 GALLIUM NITRIDE COMPOUND SEMICONDUCTOR LASER AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a gallium nitride compound semiconductor laser which is capable of oscillating continuously and stably in a basic lateral mode, of low astigmatism, and low in threshold current density by a method wherein a light trapping layer whose refractive index is larger than that of a current injection part is provided to a current block layer, and furthermore the current injection part has a structure where it becomes gradually large in refractive index starting from its center toward ends. SOLUTION: The gallium nitride compound semiconductor laser of this invention has a structure where a quantum well structure active layer 107 whose refractive index is set larger at its periphery than at the center of its stripe, a P-GaN waveguide layer 108, and a P-AlGaN clad layer 109 are successively formed above an N-Al0.15 Ga0.85 N clad layer 103 and an N-GaN waveguide layer 104, a P-In0.1 Ga0.9 N current block layer 105 and an N-In0.1 Ga0.9 N current block layer 106 both large in refractive index are each formed on both the sides of the stripe, and furthermore a P-Al0.15 Ga0.85 N clad layer 110 is formed on all the surface.
申请公布号 JPH1187856(A) 申请公布日期 1999.03.30
申请号 JP19970250250 申请日期 1997.09.16
申请人 TOSHIBA CORP 发明人 ONOMURA MASAAKI;HATAGOSHI GENICHI;ITAYA KAZUHIKO;YOSHIDA HIROAKI;SUZUKI MARIKO
分类号 H01L33/06;H01L33/14;H01L33/32;H01L33/34;H01S5/00;H01S5/323;H01S5/343 主分类号 H01L33/06
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