发明名称 Delta IDDQ testing
摘要 A method for IDDQ testing to detect defects in a semiconductor device in the presence of a high background leakage current. In one embodiment at least a portion of a semiconductor device is biased and a first quiescent current measurement is taken. The portion of the semiconductor device that was biased is then unbiased and a second quiescent current measurement is taken. The first and second quiescent currents are then compared to determine if a defect exists in that portion of the semiconductor device.
申请公布号 US5889408(A) 申请公布日期 1999.03.30
申请号 US19960670545 申请日期 1996.06.27
申请人 INTEL CORPORATION 发明人 MILLER, ANTHONY C.
分类号 G01R31/30;(IPC1-7):G01R31/28 主分类号 G01R31/30
代理机构 代理人
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