| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an argon refining method in which argon is refined by a simple processing under a low consumption of energy. SOLUTION: Oxygen is added to argon gas containing as impurities nitrogen, carbon mono-oxide, oxygen and methane, the carbon mono-oxide is oxidized in a carbon mono-oxide oxidizing tower 31 under a presence of catalyst, and then carbon mono-oxide is changed into carbon di-oxide. Hydrogen is added to argon gas, oxygen and hydrogen are reacted under the presence of catalyst at a deoxy tower 33 and changed into water. Carbon di-oxide and water are removed from argon gas under application of adsorbing agent at a carbon removing and drying device 50. Argon gas is cooled at a main heat exchanger 60 or the like and liquefied. Thereafter, the liquefied argon is fed into a refining tower 70 and then a refining processing is carried out with returning liquid having argon as its major substance. Argon gas having nitrogen condensed therein is separated at the top end 76 of the refining tower, liquid argon having methane condensed therein is separated at a bottom part 77, and then high purity argon gas is recovered from gaseous phase at a middle stage.</p> |
