SENSOR WITH DIAPHRAGM SENSOR CHIP

摘要

An acceleration sensor with a diaphragm sensor chip (6) which includes a plurality of lead frames (3). One of the lead frames (3) has a die pad (4). The sensor chip (6) is elastically bonded with an adhesive (10) onto the die pad (4). The sensor chip (6) has a diaphragm (6b) and outputs a signal representing the flexure of the diaphragm (6b). The lead frames (3) are encapsulated with the molding material (2), with a space around the sensor chip (6). The molding material has a linear expansion coefficient of 1.4x10<-5>/ DEG C to 1.8x10<-5>/ DEG C and an elastic modulus of 100x10<3> kg/cm<2> to 130x10<3> kg/cm<2>. The use of such a molding material (2) decreases the rate of change of the temperature sensitivity of the acceleration sensor, thus providing an acceleration sensor with excellent temperature characteristics.