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发明名称
Fabrication method of semiconductor device with HSG configuration
摘要
申请公布号
GB9902408(D0)
申请公布日期
1999.03.24
申请号
GB19990002408
申请日期
1999.02.03
申请人
NEC CORPORATION
发明人
分类号
H01L27/04;H01L21/02;H01L21/321;H01L21/822;H01L21/8242;H01L27/108
主分类号
H01L27/04
代理机构
代理人
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