| 摘要 |
PURPOSE:To enable an excimer laser device to be enhanced in laser output by a method wherein the absorption loss of laser rays which occurs due to halogen gas present on a laser ray path excluding a laser discharge space is eliminated in a laser tube charged with laser gas. CONSTITUTION:In a laser tube 2 charged with laser gas, a laser ray axis 6 is covered with a cylindrical duct 9 excluding a laser discharge space 4, and a means which introduces rare gas into the duct 9 concerned from outside is provided, where all or a part of the duct concerned is formed of insulator. |
